Application Progress of Soft Film Nanoimprint Lithography Technology
School of Intelligent Manufacturing, Jilin Vocational College of Industry and Technology, Jilin 132013, China
| Abstract: | Soft Film Nanoimprint Lithography (SMNIL) is an emerging nanomanufacturing technology that excels in achieving precise transfer of nanoscale patterns to substrate materials using flexible films as molds. This versatile technology exhibits promising applications in semiconductors, biopharmaceuticals, and optoelectronics owing to its cost-effectiveness, high resolution, and scalability. In semiconductor manufacturing, SMNIL has notably enhanced chip integration and performance. In biomedicine, it is utilized for fabricating micro- and nanoscale biochips, aiding in disease diagnosis and drug screening. In optoelectronics, SMNIL contributes to the production of optical waveguides, micro/nano gratings, and organic light-emitting diodes (OLEDs), enhancing equipment performance and reducing costs. Despite its advantages, challenges persist in template durability, processing accuracy, and large-scale production for SMNIL. Future developments should focus on enhancing the performance of soft film materials, developing more efficient embossing equipment, and expanding application scopes. SMNIL holds immense potential in the field of nanomanufacturing, and addressing these challenges will further propel its widespread adoption. |
| Keywords: | Nanoimprinting; Flexible Film Mold; High Resolution; Micro Nano Processing; Biochip |
| DOI: | 10.57237/j.se.2024.02.001 |
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收稿日期: 2024-01-19
接受日期: 2024-03-04
在线出版日期: 2024-03-11
基金
| 1. | 2024 Jilin Provincial Department of Education Science Research Project "Preparation and Application of New Self heating Composite Nanoimprint Film" (project no. JJKH20241130KJ) |
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